The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Mar. 27, 2009
Taisuke Koroku, Sagamihara, JP;
Takeshi Wakabayashi, Sayama, JP;
Osamu Okada, Hamura, JP;
Osamu Kuwabara, Tokyo, JP;
Junji Shiota, Hamura, JP;
Nobumitsu Fujii, Ome, JP;
Taisuke Koroku, Sagamihara, JP;
Takeshi Wakabayashi, Sayama, JP;
Osamu Okada, Hamura, JP;
Osamu Kuwabara, Tokyo, JP;
Junji Shiota, Hamura, JP;
Nobumitsu Fujii, Ome, JP;
Casio Computer Co., Ltd., Tokyo, JP;
Abstract
A low dielectric constant film/wiring line stack structure made up of a stack of low dielectric constant films and wiring lines is provided in a region on the upper surface of the semiconductor substrate except for the peripheral part of this surface. The peripheral side surface of the low dielectric constant film/wiring line stack structure is covered with a sealing film. This provides a structure in which the low dielectric constant films do not easily come off. In this case, a lower protective film is provided on the lower surface of a silicon substrate to protect this lower surface against cracks.