The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 10, 2012

Filed:

Mar. 26, 2009
Applicants:

Toshiki Tachikawa, Niihama, JP;

Toru Asaba, Niihama, JP;

Toshiaki Ochi, Niihama, JP;

Inventors:

Toshiki Tachikawa, Niihama, JP;

Toru Asaba, Niihama, JP;

Toshiaki Ochi, Niihama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a charged particle beam irradiating apparatus capable of simply preventing unevenness or reduction in a peripheral portion of the dose distribution of a charged particle beam. A charged particle beam irradiating apparatus includes scanning electromagnets that scan a charged particle beam and a control device that controls the operations of the scanning electromagnets. In the charged particle beam irradiating apparatus, the control unit changes a scanning speed when the charged particle beam is irradiated along an irradiation line such that a peripheral portion of the dose distribution of the charged particle beam is corrected.


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