The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Dec. 05, 2005
Applicant:
Henning Sirringhaus, Coton, GB;
Inventor:
Henning Sirringhaus, Coton, GB;
Assignee:
Plastics Logic Limited, Cambridge, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a patterned layer, including the steps of: (i) depositing via a liquid medium a first material onto a substrate to form a first body on said substrate; (ii) depositing via a liquid medium a second material onto said substrate to form a second body, wherein said first body is used to control said deposition of said second material so as to form a patterned structure including said first and second bodies; and (iii) using said patterned structure to control the removal of selected portions of a layer of material in a dry etching process or in a wet etching process using a bath of etchant.