The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Jun. 23, 2003
Applicants:
Venkat Selvamanickam, Wynantskill, NY (US);
Hee-gyoun Lee, Guilderland, NY (US);
Inventors:
Venkat Selvamanickam, Wynantskill, NY (US);
Hee-Gyoun Lee, Guilderland, NY (US);
Assignee:
SuperPower, Inc., Schenectady, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 12/06 (2006.01); H01L 39/12 (2006.01); B32B 18/00 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
An MOCVD apparatus and process for producing multi-layer HTS-coated tapes with increased current capacity which includes multiple liquid precursor sources, each having an associated pump and vaporizer, the outlets of which feed a multiple compartment showerhead apparatus within an MOCVD reactor. The multiple compartment showerhead apparatus is located in close proximity to an associated substrate heater which together define multiple deposition sectors in a deposition zone.