The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Feb. 23, 2009
Lianjun Liu, Chandler, AZ (US);
Melvy F. Miller, Tempe, AZ (US);
Lianjun Liu, Chandler, AZ (US);
Melvy F. Miller, Tempe, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A MEMS capacitive device () includes a fixed capacitor plate () formed on a surface () of a substrate (). A movable capacitor plate () is suspended above the fixed capacitor plate () by compliant members () anchored to the surface (). A movable element () is positioned in spaced apart relationship from the movable capacitor plate () and has an actuator () formed thereon. Actuation of the actuator () causes abutment of a portion of the movable element () against a contact surface () of the movable plate (). The abutment moves the movable plate () toward the fixed plate () to alter a capacitance () between the plates (). Another substrate () may be coupled to the substrate () such that a surface () of the substrate () faces the surface () of the substrate (). The movable element () may be formed on the surface ().