The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Aug. 22, 2007
Hiroyuki Shinogi, Gifu, JP;
Katsuhiko Kitagawa, Ota, JP;
Kazuo Okada, Ota, JP;
Hiroshi Yamada, Ebina, JP;
Hiroyuki Shinogi, Gifu, JP;
Katsuhiko Kitagawa, Ota, JP;
Kazuo Okada, Ota, JP;
Hiroshi Yamada, Ebina, JP;
Semiconductor Components Industries, LLC, Phoenix, AZ (US);
SANYO Semiconductor Co., Ltd., Gunma, JP;
Abstract
This invention is directed to offer a semiconductor device in which a cavity space is easily provided in a specific region when a supporting member is bonded to a semiconductor substrate through an adhesive layer, and its manufacturing method. A resist layer is applied to an entire top surface of the semiconductor substrate, and exposure to transfer a pattern is performed. By subsequent development and selective removal of the resist layer, the resist layer is formed into a shape of a plurality of columnar structures. Then, an adhesive material made of an epoxy resin or the like is applied to the entire top surface of the semiconductor substrate. The adhesive material is gathered around the columnar structuresby itself to form an adhesive layer. Therefore, in contrast, the adhesive layerdoes not deposit in a region where the cavity is to be formed. Then, the supporting memberis bonded through the columnar structuresand the adhesive layer. By bonding the supporting member, there is formed the cavitysurrounded with the semiconductor substrate, the columnar structuresand the supporting member