The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8148246 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 03, 2012

Filed:

May. 07, 2009
Applicants:

Wen Yu Lin, Taichung County, TW;

Shih Cheng Huang, Hsinchu, TW;

Po Min Tu, Chiayi County, TW;

Chih Peng Hsu, Tainan County, TW;

Shih Hsiung Chan, Hsinchu County, TW;

Inventors:

Wen Yu Lin, Taichung County, TW;

Shih Cheng Huang, Hsinchu, TW;

Po Min Tu, Chiayi County, TW;

Chih Peng Hsu, Tainan County, TW;

Shih Hsiung Chan, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for separating a semiconductor from a substrate is disclosed. The method comprises the following steps: forming a plurality of columns on a substrate; epitaxially growing a semiconductor on the plurality of columns; and injecting etching liquid into the void among the plurality of columns so as to separate the semiconductor from the substrate. The method of this invention can enhance the etching efficiency of separating the semiconductor from the substrate and reduce the fabrication cost because the etching area is increased due to the void among the plurality of columns. In addition, the method will not confine the material of the above-mentioned substrate.


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