The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Feb. 16, 2011
Applicants:
Hiroaki Kikuchi, Chitose, JP;
Tomoaki Yamabayashi, Chitose, JP;
Osamu Takahashi, Chitose, JP;
Inventors:
Assignee:
Mitsumi Electric Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/8232 (2006.01); H01L 21/335 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a biosensor includes forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate; forming a second silicon oxide film on the other surface of the silicon substrate; forming a source electrode, a drain electrode, and a channel on the first silicon oxide film, the channel connecting the source electrode and the drain electrode; and removing the polysilicon film.
Kikuchi, Hiroaki. (2012). Method of producing a biosensor (U.S. Patent No. 8148213). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8148213
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile