The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Dec. 03, 2009
Yuichi Miyoshi, Niigata, JP;
Yusuke Takeuchi, Kanagawa, JP;
Tohru Yamaoka, Osaka, JP;
Hiroshi Ogura, Tokyo, JP;
Yuichi Miyoshi, Niigata, JP;
Yusuke Takeuchi, Kanagawa, JP;
Tohru Yamaoka, Osaka, JP;
Hiroshi Ogura, Tokyo, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A diaphragm structure for a MEMS device includes a through-hole formed so as to penetrate from an upper surface to a bottom surface of a substrate; and a vibrating electrode film formed on the upper surface of the substrate so as to cover the through-hole. An opening shape of the through-hole in the upper surface of the substrate is substantially hexagonal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile