The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Mar. 23, 2009
Katsumi Homma, Kawasaki, JP;
Katsumi Homma, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A monitor position determining apparatus includes an acquiring unit that acquires design data concerning circuit elements arranged in a layout of a semiconductor device and for each of the circuit elements, yield sensitivity data indicative of a percentage of change with respect to a yield ratio of the semiconductor device; a selecting unit that selects, based on the yield sensitivity data, a circuit element from a circuit element group arranged in the layout; a determining unit that determines an arrangement position in the layout to be an installation position of a monitor that measures a physical amount in the semiconductor device in a measurement region, the arrangement position being of the circuit element that is specified from the design data acquired by the acquiring unit and selected by the selecting unit; and an output unit that outputs the installation position determined by the determining unit.