The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Oct. 22, 2010
Peter Gefter, South San Francisco, CA (US);
Aleksey Klochkov, San Francisco, CA (US);
John Menear, Santa Cruz, CA (US);
Peter Gefter, South San Francisco, CA (US);
Aleksey Klochkov, San Francisco, CA (US);
John Menear, Santa Cruz, CA (US);
Other;
Abstract
Ion delivery manifolds with a gas transport channel, for receiving an ionized gas stream, and plural outlets that divide the gas stream into plural neutralization gas streams that are directed toward respective plural target regions are disclosed. At least generally equal ion distribution across the target regions is achieved by using different ion flow rates through the plural outlets. Methods of delivering plural neutralization streams to respective plural target regions include steps for receiving an ionized gas stream, for dividing the ionized gas stream into plural neutralization streams, and for directing the neutralization streams toward respective target regions. At least generally equal ion distribution across the target regions is achieved by differing the ion flow rates of the neutralization streams.