The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Aug. 19, 2010
Woo Seok Yang, Daejeon, KR;
Sang Hoon Cheon, Daejeon, KR;
Seong Mok Cho, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Chang Auck Choi, Daejeon, KR;
Woo Seok Yang, Daejeon, KR;
Sang Hoon Cheon, Daejeon, KR;
Seong Mok Cho, Daejeon, KR;
Ho Jun Ryu, Seoul, KR;
Chang Auck Choi, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.