The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2012

Filed:

Jul. 09, 2010
Applicants:

Gregory S. Herman, Albany, OR (US);

Peter Mardilovich, Corvallis, OR (US);

Randy L. Hoffman, Corvallis, OR (US);

Laura Lynn Kramer, Corvallis, OR (US);

Kurt M. Ulmer, Corvallis, OR (US);

Inventors:

Gregory S. Herman, Albany, OR (US);

Peter Mardilovich, Corvallis, OR (US);

Randy L. Hoffman, Corvallis, OR (US);

Laura Lynn Kramer, Corvallis, OR (US);

Kurt M. Ulmer, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/471 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method forms a first inorganic dielectric layer having a first concentration of defects and a second inorganic dielectric layer in contact with a first layer and having a second lesser concentration of defects.


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