The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Jun. 10, 2009
Applicants:
Tsuyoshi Kurosawa, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Inventors:
Tsuyoshi Kurosawa, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Assignee:
Tokyo Ohka Tokyo Co., Ltd., Kanagawa-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
A resist composition for immersion exposure, including a base component (A) that exhibits changed solubility in an alkali developing solution under action of acid, an acid generator component (B) that generates acid upon exposure, and a fluorine-containing compound (C) represented by general formula (c-1) (in formula (c-1), Rrepresents an organic group which may contain a polymerizable group; X represents a divalent organic group having an acid dissociable portion; and Rrepresents an organic group having a fluorine atom).