The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Feb. 22, 2007
Yuta Hasebe, Obu, JP;
Hiroshi Tanaka, Toyokawa, JP;
Masanobu Azukawa, Anjo, JP;
Junichi Tanaka, Nukata-gun, JP;
Tadashi Kobayashi, Nagoya, JP;
Kenta Iwahana, Okazaki, JP;
Yuta Hasebe, Obu, JP;
Hiroshi Tanaka, Toyokawa, JP;
Masanobu Azukawa, Anjo, JP;
Junichi Tanaka, Nukata-gun, JP;
Tadashi Kobayashi, Nagoya, JP;
Kenta Iwahana, Okazaki, JP;
DENSO CORPORATION, Kariya, JP;
Abstract
A vibration device separates foreign particles from a semiconductor device, and a suction interface of a suction device covers an opening portion of the semiconductor device. A space connected with a vacuum passage and a communication passage is formed between the semiconductor device and the suction interface. The suction device suctions the space, and fresh air is introduced into the space through the communication passage. As a result, a current of air is generated from the communication passage to the vacuum passage, and foreign particles are suctioned and removed from the space.