The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Jan. 19, 2007
Takahiko Wakatsuki, Kanagawa-ken, JP;
Naoya Hayamizu, Kanagawa-ken, JP;
Hiroshi Fujita, Kanagawa-ken, JP;
Akiko Saito, Kanagawa-ken, JP;
Toshihide Hayashi, Kanagawa-ken, JP;
Yukinobu Nishibe, Kanagawa-ken, JP;
Tsutomu Makino, Kanagawa-ken, JP;
Takahiko Wakatsuki, Kanagawa-ken, JP;
Naoya Hayamizu, Kanagawa-ken, JP;
Hiroshi Fujita, Kanagawa-ken, JP;
Akiko Saito, Kanagawa-ken, JP;
Toshihide Hayashi, Kanagawa-ken, JP;
Yukinobu Nishibe, Kanagawa-ken, JP;
Tsutomu Makino, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A processing apparatus includes: a tank configured to store water; vapor generating unit configured to turn the water supplied from the tank into vapor; a processing chamber in which vapor supplied from the vapor generating unit is used to remove residues from a workpiece; cooling unit; and filtering unit. The cooling unit cools waste liquid ejected from the processing chamber. The filtering unit is provided between the cooling unit and the tank, and the filtering unit filters the waste liquid cooled in the cooling unit. A processing method includes: supplying vapor into a processing chamber; removing residues from a workpiece using the vapor; cooling waste liquid containing the removed residues to precipitate the residues as solids; and filtering the waste liquid containing the precipitates.