The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Jul. 27, 2007
Tomonobu Nakayama, Saitama, JP;
Seiji Higuchi, Kyoto, JP;
Tomonobu Nakayama, Saitama, JP;
Seiji Higuchi, Kyoto, JP;
National Institute for Materials Science, Ibaraki, JP;
Horiba, Ltd., Kyoto, JP;
Abstract
A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately. The scanning probe microscope comprises multiple probesmovable in the XYZ-directions, a stageon which a specimenis placed and that is movable in the XY-directions, a detecting partthat detects the physical properties that changes with the movements of each of the probesin the Z-direction according to the surface shape of the specimen, at a time when each of the probesor the stageis moved in the XY-directions, an image generating partthat images the surface image of the specimenin response to the detected signals from the detecting part, and a relative position calculating partthat obtains the surface image based on each of the probesand obtained by the image generating part, when the stageis moved in the XY-directions without changing a relative position between the probesin the XY-directions, and calculates the relative position between the probesby checking the surface images obtained by the probes.