The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Dec. 17, 2010
Masahiko Okunuki, Akiruno, JP;
Osamu Tsujii, Utsunomiya, JP;
Takeo Tsukamoto, Atsugi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A compact apparatus can form multi-X-ray beams with good controllability. Electron beams (e) emitted from electron emission elements () of a multi-electron beam generating unit () receive the lens effect of a lens electrode (). The resultant electron beams are accelerated to the final potential level by portions of a transmission-type target portion () of an anode electrode (). The multi-X-ray beams (x) generated by the transmission-type target portion () pass through an X-ray shielding plate () and X-ray extraction portions () in a vacuum chamber and are extracted from the X-ray extraction windows () of a wall portion () into the atmosphere.