The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Jul. 17, 2009
Applicant:
Xingtao Wu, Woburn, MA (US);
Inventor:
Xingtao Wu, Woburn, MA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS hierarchically-dimensioned deformable mirror comprising a substrate, a plurality of spacers disposed on the substrate, a plurality of piezoelectric cantilever microactuators disposed on the plurality of spacers, and a continuous deformable membrane disposed on the plurality of the cantilever assemblies, has significantly improved overall device performances owing to the use of the cantilever microactuators based on relaxor ferroelectric single crystal materials or other piezoelectric materials.