The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Aug. 11, 2009
Kiyotaka Yashima, Miyagi, JP;
Yoshinari Kiwaki, Miyagi, JP;
Kamada Michiru, Miyagi, JP;
Sachio Karino, Miyagi, JP;
Hironobu Narui, Kanagawa, JP;
Nobukata Okano, Kanagawa, JP;
Kiyotaka Yashima, Miyagi, JP;
Yoshinari Kiwaki, Miyagi, JP;
Kamada Michiru, Miyagi, JP;
Sachio Karino, Miyagi, JP;
Hironobu Narui, Kanagawa, JP;
Nobukata Okano, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A convex part formation method of forming a convex part in parallel with a <110> direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the <110> direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of θ; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of θ(where θ≠θ).