The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Jan. 21, 2010
Eiji Fuchita, Narita, JP;
Eiji Fuchita, Narita, JP;
Fuchita Nanotechnology Ltd., Chiba, JP;
Abstract
[Object] To provide a method for forming a zirconia film, which is capable of obtaining favorable film quality by an aerosol gas deposition method. [Solving Means] The method for forming a zirconia film by an aerosol gas deposition method, the method including: placing zirconia fine particles P having a mean particle diameter of 0.7 μm or more and 11 μm or less and a specific surface area of 1 m/g or more and 7 m/g or less in a closed container; generating aerosol A of the zirconia fine particles P by introduction of a gas into the closed container; conveying the aerosol A through a transfer pipeconnected to the closed containerinto a deposition chamberkept at a pressure lower than that of the closed container; and depositing the zirconia fine particles P on a substrate S placed in the deposition chamber. It is possible to form a zirconia thin film that is dense and highly adhesive to the substrate by zirconia fine particles satisfying the above-mentioned conditions.