The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
May. 04, 2005
Stefan Bangert, Steinau, DE;
Frank Fuchs, Geiselbach-Ommersbach, DE;
Ralph Lindenberg, Büdingen, DE;
Andreas Lopp, Freigericht-Somborn, DE;
Uwe Schüssler, Aschaffenburg, DE;
Tobias Stolley, Frankfurt am Main, DE;
Stefan Bangert, Steinau, DE;
Frank Fuchs, Geiselbach-Ommersbach, DE;
Ralph Lindenberg, Büdingen, DE;
Andreas Lopp, Freigericht-Somborn, DE;
Uwe Schüssler, Aschaffenburg, DE;
Tobias Stolley, Frankfurt am Main, DE;
Applied Materials GmbH & Co. KG, Alzenau, DE;
Abstract
This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly () where the material to be sputtered is located on a target () with a curved surface, the material to be sputtered being located, in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies () with rotatable, curved targets () positioned one beside the other.