The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Dec. 19, 2007
Wei Liu, San Jose, CA (US);
Johanes S. Swenberg, Los Gatos, CA (US);
Hanh D. Nguyen, San Jose, CA (US);
Son T. Nguyen, San Jose, CA (US);
Roger Curtis, Stockton, CA (US);
Philip A. Bottini, Santa Clara, CA (US);
Wei Liu, San Jose, CA (US);
Johanes S. Swenberg, Los Gatos, CA (US);
Hanh D. Nguyen, San Jose, CA (US);
Son T. Nguyen, San Jose, CA (US);
Roger Curtis, Stockton, CA (US);
Philip A. Bottini, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention generally provides apparatus and method for processing a substrate. Particularly, the present invention provides apparatus and methods to obtain a desired distribution of a process gas. One embodiment of the present invention provides an apparatus for processing a substrate comprising an injection nozzle having a first fluid path including a first inlet configured to receive a fluid input, and a plurality of first injection ports connected with the first inlet, wherein the plurality of first injection ports are configured to direct a fluid from the first inlet towards a first region of a process volume, and a second fluid path including a second inlet configured to receive a fluid input, and a plurality of second injection ports connected with the second inlet, wherein the second injection ports are configured to direct a fluid from the second inlet towards a second region of the process volume.