The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2012
Filed:
Mar. 24, 2008
Kazuyuki Haneda, Ichihara, JP;
Satoshi Fujinami, Minamitsuru-gun, JP;
Takeshi Jonouchi, Minamitsuru-gun, JP;
Kazuyuki Haneda, Ichihara, JP;
Satoshi Fujinami, Minamitsuru-gun, JP;
Takeshi Jonouchi, Minamitsuru-gun, JP;
Showa Denko K.K., Tokyo, JP;
Citizen Seimitsu Co., Ltd., Yamanashi, JP;
Abstract
The disk-shaped substrate manufacturing method is provided with: generating an air stream downward from an upper area during grinding a disk-shaped substrate in a grinding apparatus; arranging the grinding apparatus on an upper floor face of a floor and arranging water on a lower floor face of the floor, the upper floor face being made of a board having penetration holes or a mesh member, and the lower floor face supporting the upper floor face so as to be located above the lower floor face with a distance; and guiding dust made by the grinding apparatus to the water by use of the air stream.