The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Jul. 28, 2008
Makoto Nakano, Hamamatsu, JP;
Koji Kuno, Hamamatsu, JP;
Tetsuya Osajima, Hamamatsu, JP;
Takashi Inoue, Hamamatsu, JP;
Masayoshi Kumagai, Hamamatsu, JP;
Makoto Nakano, Hamamatsu, JP;
Koji Kuno, Hamamatsu, JP;
Tetsuya Osajima, Hamamatsu, JP;
Takashi Inoue, Hamamatsu, JP;
Masayoshi Kumagai, Hamamatsu, JP;
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
An object to be processedis irradiated with a laser light L modulated by a reflection type spatial light modulatorsuch that aberration of the laser light L converged inside the objectbecomes a predetermined aberration or less. Therefore, aberration of the laser light L generated at a position on which a converging point P of the laser light L is located is made as small as possible, to enhance the energy density of the laser light L at that position, which makes it possible to form a modified regionwith a high function as a starting point for cutting. In addition, because the reflection type spatial light modulatoris used, it is possible to improve the utilization efficiency of the laser light L as compared with a transmissive type spatial light modulator. Such improvement of the utilization efficiency of the laser light L is particularly important in the case in which the modified regionserving as a starting point for cutting is formed in the plate-shaped object