The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Sep. 26, 2008
Jieguang Huo, Shanghai, CN;
Jianping Yang, Shanghai, CN;
Jieguang Huo, Shanghai, CN;
Jianping Yang, Shanghai, CN;
Abstract
A method of forming a CMOS image sensor device. The method includes providing a semiconductor substrate having a P-type impurity characteristic. The semiconductor substrate includes a surface region. The method includes forming a gate oxide layer overlying the surface region and forming a first gate structure overlying a first portion of the gate oxide layer, the first gate structure has a top surface region and at least a side region. The method forms an N-type impurity region in a portion of the semiconductor substrate to form a photodiode device region from the N-type impurity region and the P-type impurity. The method includes forming a blanket spacer layer including an oxide on nitride on oxide structure overlying at least the first gate structure; and forming one or more spacer structures using the blanket spacer layer for the first gate structure while maintaining a portion of the oxide layer from the oxide on nitride on oxide overlying at least the photo-diode device region.