The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Feb. 26, 2010
Jeffrey Birkmeyer, San Jose, CA (US);
Youming LI, San Jose, CA (US);
Steve Deming, San Jose, CA (US);
Mats G. Ottosson, Cupertino, CA (US);
Jeffrey Birkmeyer, San Jose, CA (US);
Youming Li, San Jose, CA (US);
Steve Deming, San Jose, CA (US);
Mats G. Ottosson, Cupertino, CA (US);
FUJIFILM Corporation, Tokyo, JP;
Abstract
A physical vapor deposition apparatus includes a vacuum chamber having side walls, a cathode inside the vacuum chamber, wherein the cathode is configured to include a sputtering target, a radio frequency power supply configured to apply power to the cathode, an anode inside and electrically connected to the side walls of the vacuum chamber, a chuck inside and electrically isolated from the side walls of the vacuum chamber, the chuck configured to support a substrate, a clamp configured to hold the substrate to the chuck, wherein the clamp is electrically conductive, and a plurality of conductive electrodes attached to the clamp, each electrode configured to compress when contacted by the substrate.