The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Oct. 27, 2008
Norman L. Boling, Santa Rosa, CA (US);
Miles Rains, Santa Rosa, CA (US);
Howard Robert Gray, Sebastopol, CA (US);
Norman L. Boling, Santa Rosa, CA (US);
Miles Rains, Santa Rosa, CA (US);
Howard Robert Gray, Sebastopol, CA (US);
Deposition Sciences, Inc., Santa Rosa, CA (US);
Abstract
A method and system for depositing a thin film on a substrate. In the system a target material is deposited and reacted on a substrate surface to form a substantially non-absorbing thin film. The volume of non-absorbing thin film formed per unit of time may be increased by increasing the area of the surface by a factor of 'x' and increasing the rate of deposition of the target material by a factor greater than the inverse of the factor 'x' to thereby increase the rate of formation of the volume of non-absorbing thin film per unit of time.