The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2012
Filed:
Nov. 20, 2008
Takeo Yajima, Tokyo, JP;
Takeo Yajima, Tokyo, JP;
Koganei Corporation, Tokyo, JP;
Abstract
A chemical liquid supplying apparatus, which can discharge chemical liquid with high precision, is provided. A pump assembly is detachably mounted in a pump case in which liquid inflow and discharge ports are formed. The pump assembly includes: a cylindrical body in which a piston is slidably incorporated axially; an elastically deformable bellows forming a pump chamber in the pump case and forming a drive chamber in which an indirect medium is enclosed; and an axially elastically-deformable bellows cover continuing with a sliding surface of the piston and forming a seal chamber in which the indirect medium is enclosed, and the pump assembly is unitized. The pump assembly is coupled to a drive shaft via a connecting member, and by axial-directional reciprocating movement of this drive shaft, the piston causes the bellows to perform a pump operation, whereby the chemical liquid is discharged from a liquid discharge portion.