The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Dec. 26, 2007
Applicants:
Shien Cho, Kanagawa, JP;
Markus Wilde, Tokyo, JP;
Katsuyuki Fukutani, Tokyo, JP;
Inventors:
Assignees:
Renesas Electronics Corporation, Kanagawa, JP;
The Foundation for the Promotion of Industrial Science, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 37/00 (2006.01); G01D 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.