The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Feb. 06, 2009
Chun-i Wu, Tainan, TW;
Kai-ping Chuang, Pingtung County, TW;
Wan-yi Lin, Yunlin County, TW;
Yi-chen Hsieh, Changhua County, TW;
Fu-shiang Yang, Hsinchu County, TW;
Chun-I Wu, Tainan, TW;
Kai-Ping Chuang, Pingtung County, TW;
Wan-Yi Lin, Yunlin County, TW;
Yi-Chen Hsieh, Changhua County, TW;
Fu-Shiang Yang, Hsinchu County, TW;
Industrial Technology Research Institute, Hsin-Chu, TW;
Abstract
A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to pass through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.