The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Jul. 02, 2008
Thomas Kirchmeier, Teningen, DE;
Hans-juergen Windisch, Ehrenkirchen, DE;
Hanns-joachim Knaus, Emmendingen, DE;
Michael Glueck, Freiburg, DE;
Gerd Hintz, Pfaffenweiler, DE;
Thomas Kirchmeier, Teningen, DE;
Hans-Juergen Windisch, Ehrenkirchen, DE;
Hanns-Joachim Knaus, Emmendingen, DE;
Michael Glueck, Freiburg, DE;
Gerd Hintz, Pfaffenweiler, DE;
HUETTINGER Elektronik GmbH + Co. KG, Freiburg, DE;
Abstract
A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasma supply device includes at least one inverter connected to a DC power supply, which inverter has at least one switching element, and an output network. The output network is arranged on a printed circuit board. The output network can therefore be designed low priced and accurately.