The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Jun. 16, 2008
Applicants:
Tatsuya Suzuki, Kanagawa, JP;
Hidemitsu Aoki, Kanagawa, JP;
Inventors:
Tatsuya Suzuki, Kanagawa, JP;
Hidemitsu Aoki, Kanagawa, JP;
Assignee:
Renesas Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
A first oxide film and a second oxide filmare formed in a first regionand a second regionrespectively, on the surface of the semiconductor substrate, via thermal oxidization method, and the first oxide film is removed while the second oxide filmis covered with the resist layerformed thereon, and then the resist layeris removed with a chemical solution containing an organic solvent such as isopropyl alcohol as a main component. Subsequently, a third oxide filmhaving different thickness than the second oxide filmis formed in the first region