The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2012

Filed:

Sep. 12, 2007
Applicants:

Hidetaka Matsuuchi, Wakayama, JP;

Ryuichi Iwasaki, Wakayama, JP;

Hirofumi Mankawa, Wakayama, JP;

Shigeru Masuda, Wakayama, JP;

Masaaki Mike, Wakayama, JP;

Sang Hun Lee, San Ramon, CA (US);

Inventors:

Hidetaka Matsuuchi, Wakayama, JP;

Ryuichi Iwasaki, Wakayama, JP;

Hirofumi Mankawa, Wakayama, JP;

Shigeru Masuda, Wakayama, JP;

Masaaki Mike, Wakayama, JP;

Sang Hun Lee, San Ramon, CA (US);

Assignees:

Amarante Technologies, Inc., Santa Clara, CA (US);

Saian Corporation, Wakayama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); B23K 9/00 (2006.01); B23K 9/02 (2006.01); H01J 17/26 (2006.01); H01J 7/24 (2006.01); H05B 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A plasma generator is provided which includes: a microwave generation portion which generates a microwave; a wave guide for propagating the microwave; a plurality of plasma generation nozzles which are attached to the wave guide so as to be apart from each other in the direction where the microwave is propagated, receive the microwave, and generate and emit a plasmatic gas based on the energy of this microwave; and a plurality of stabs which correspond to a part or the whole part of the plasma generation nozzles and are each disposed in the wave guide so as to lie in a rear position a predetermined distance apart from each other in the direction where the microwave is propagated.


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