The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Dec. 24, 2008
Ken Unno, Tokyo, JP;
Takao Noguchi, Tokyo, JP;
Kenichi Tochi, Tokyo, JP;
Kazuya Maekawa, Tokyo, JP;
TDK Corporation, Tokyo, JP;
Abstract
An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing elementaccording to the present embodiment includes oscillation armsandformed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper memberis provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions, the oscillation armsandand the first stopper memberare integrally formed by processing a semiconductor material, such as silicon.