The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
May. 24, 2010
Hideki Yagi, Yokohama, JP;
Kenji Koyama, Yokohama, JP;
Hiroyuki Yoshinaga, Yokohama, JP;
Kuniaki Ishihara, Yokohama, JP;
Hideki Yagi, Yokohama, JP;
Kenji Koyama, Yokohama, JP;
Hiroyuki Yoshinaga, Yokohama, JP;
Kuniaki Ishihara, Yokohama, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
A method for manufacturing an LD is disclosed. The LD has a striped structure including an optical active region. The striped structure is buried with resin, typically benzo-cyclo-butene (BCB). The method to form an opening in the BCB layer has tri-steps etching of the RIE. First step etches the BCB layer partially by a mixed gas of CFand O, where CFhas a first partial pressure, second step etches the photo-resist patterned on the top of the BCB layer by a mixed gas of CFand O, where CFin this step has the second partial pressure less than the first partial pressure, and third step etches the BCB left in the first step by mixed gas of CFand O, where CFin this step has the third partial pressure greater than the second partial pressure.