The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
May. 14, 2009
Daisaku Mochida, Nagoya, JP;
Daisaku Mochida, Nagoya, JP;
Nikon Corporation, Toyko, JP;
Abstract
A fly eye integrator satisfying the following expression (1) is used for an illumination system: Φ×φ/f>M×D×NA(1) wherein Φ is a diameter of a circle inscribed to a fly-eye integrator injection end surface; φ is a diameter of a circle inscribed to an end surface of each of lens elements constituting the fly-eye integrator; f is a focal distance of each of lens elements constituting the fly-eye integrator; M is a zoom multiplication ratio of the image formation optical system; Dis field-of-view diameter required for the zoom low multiplication unit of the Dimage formation optical system; and NAis a numerical aperture required for the zoom low multiplication side of the image formation optical system. Thus, it is possible to provide an image measuring apparatus which can prevent insufficient NA from the low multiplication to the high multiplication of zoom and irregularities of the field-of-view.
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