The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Dec. 12, 2008
Sun Yalei, Singapore, SG;
Uday Nayak, San Jose, CA (US);
Richard J. Casler, Jr., Cambridge, MA (US);
Thomas Rohrs, Los Altos, CA (US);
Sun Yalei, Singapore, SG;
Uday Nayak, San Jose, CA (US);
Richard J. Casler, Jr., Cambridge, MA (US);
Thomas Rohrs, Los Altos, CA (US);
FormFactor, Inc., Livermore, CA (US);
Abstract
Methods and systems for, in one embodiment, accelerating a stage through a clearance height in a first direction and decelerating the stage in the first direction while accelerating in a second direction are shown. The stage is moved in a third direction and a determination is made whether the stage movement in the second direction is below a threshold value before continuing to move the stage further in the third direction. The first direction is perpendicular to the second direction and is parallel and opposite to the third direction.