The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2012

Filed:

Jun. 27, 2006
Applicants:

Makarand Gore, Corvallis, OR (US);

James Guo, Corvallis, OR (US);

Inventors:

Makarand Gore, Corvallis, OR (US);

James Guo, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/24 (2006.01); B81B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method is disclosed for forming a chamber in an electronic device, including the steps of preparing an outer surface on a solidified core material, the solidified core material in a depression formed in a substrate. The method further includes establishing a layer on the prepared outer surface of the solidified core material and a portion of the substrate surrounding the depression. The established layer and the substrate define a chamber.


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