The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Mar. 27, 2008
Ryuji Tsukamoto, Kanagawa-ken, JP;
Ryuji Tsukamoto, Kanagawa-ken, JP;
Fujifilm Corporation, Tokyo, JP;
Abstract
The method of manufacturing a piezoelectric element includes: a lower electrode forming step of forming a lower electrode on a surface of a substrate; a piezoelectric film deposition step of depositing a piezoelectric film made of a piezoelectric material by one of epitaxial growth and oriented growth onto a surface of the lower electrode reverse to a surface adjacent to the substrate; an upper electrode forming step of forming an upper electrode onto a surface of the piezoelectric film reverse to a surface adjacent to the lower electrode; and a polarization direction reversal step of reversing a polarization direction of the piezoelectric film by maintaining, after the upper electrode forming step, a state for a prescribed duration where a temperature of the piezoelectric film is set to a first temperature while application of an electric field to the piezoelectric film in a direction from the upper electrode toward the lower electrode is performed, then keeping the application of the electric field while lowering the temperature of the piezoelectric film to a second temperature lower than the first temperature, and then stopping the application of the electric field.