The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Aug. 08, 2007
Shigeo Maeda, Osaka, JP;
Katuhiko Tanaka, Shiga, JP;
Akira Ishii, Shiga, JP;
Susumu Sugiyama, Shiga, JP;
Shigeo Maeda, Osaka, JP;
Katuhiko Tanaka, Shiga, JP;
Akira Ishii, Shiga, JP;
Susumu Sugiyama, Shiga, JP;
Funai Electric Co., Ltd., Osaka, JP;
Abstract
A manufacturing method for variable shape mirrors, which is suitable for mass production, includes a bonding step for sandwiching support pillars and piezoelectric elements between a support substrate and a mirror substrate, and bonding at least the support substrate and the support pillar to each other, the support substrate and the piezoelectric element to each other, and the mirror substrate and the support pillars to each other, respectively, and an elastic film forming step for forming a flat elastic film on the outer surface of the mirror substrate, and a reflection film forming step for forming a reflection film on the elastic film.