The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Aug. 04, 2009
Applicants:
Chuan Wei Wang, HsinChu, TW;
Sheng Ta Lee, HsinChu, TW;
Inventors:
Chuan Wei Wang, HsinChu, TW;
Sheng Ta Lee, HsinChu, TW;
Assignee:
Pixart Imaging Incorporation, R.O.C., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention discloses a micro-electro-mechanical system (MEMS) device, comprising: a substrate with at least one opening; and a membrane supported on the substrate, the membrane including at least two thin segments and a thick segment connected together, wherein the two thin segments are not at the same level, and the thick segment is formed by a plurality of layers including at least two metal layers and a via layer, such that the membrane has a curve cross section.