The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Jan. 05, 2009
Donato Cardarelli, Medfield, MA (US);
Donato Cardarelli, Medfield, MA (US);
Milli Sensor Systems + Actuators, Inc., West Newton, MA (US);
Abstract
A planar MEMS accelerometer that detects acceleration along an input axis that is orthogonal to the plane. There are spaced bonding pads coupled to a substrate. A generally planar Servo Member (SM) is flexibly coupled to the bonding pads by servo member flexures such that the SM is capable of oscillatory motion about a servo axis that is orthogonal to the plane. A generally planar plate Torque Summing Member (TSM) is located within, coplanar with, and flexibly coupled to the SM such that the TSM is capable of rotational motion about an output axis that is in the plane and orthogonal to the servo axis. The TSM is mass-imbalanced relative to the output axis. A generally planar plate rotor is located within, coplanar with, and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is in the plane. Rotor drives directly oscillate the rotor about the rotor axis at a rotor oscillation frequency and amplitude. SM drives oscillate the SM about the servo axis at a SM oscillation frequency and amplitude, and thereby also oscillate the rotor and TSM about the servo axis at the SM oscillation frequency. Motion sensors detect oscillation of the rotor and the SM. TSM motion sensors detect rotation of the TSM relative to the substrate about the output axis.