The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2012
Filed:
Aug. 24, 2009
Philip Xiaoli Feng, Pasadena, CA (US);
Matthew Matheny, Pasadena, CA (US);
Rassul Karbalin, Pomona, CA (US);
Michael L. Roukes, Pasadena, CA (US);
Philip Xiaoli Feng, Pasadena, CA (US);
Matthew Matheny, Pasadena, CA (US);
Rassul Karbalin, Pomona, CA (US);
Michael L. Roukes, Pasadena, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.