The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2012
Filed:
Mar. 27, 2009
Mayumi Block, Sunnyvale, CA (US);
Robert C. Hefty, Fremont, CA (US);
Stephen M. Sirard, San Jose, CA (US);
Kenji Takeshita, Sunnyvale, CA (US);
Mayumi Block, Sunnyvale, CA (US);
Robert C. Hefty, Fremont, CA (US);
Stephen M. Sirard, San Jose, CA (US);
Kenji Takeshita, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of removing carbon doped silicon oxide between metal contacts is provided. A layer of the carbon doped silicon oxide is converted to a layer of silicon oxide by removing the carbon dopant. The converted layer of silicon oxide is selectively wet etched with respect to the carbon doped silicon oxide and the metal contacts, which forms recess between the metal contacts.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile