The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2012
Filed:
Oct. 26, 2007
Applicants:
Staffan Nordlinder, Norrköping, SE;
Nathaniel D. Robinson, Kolmården, SE;
Payman Therani, Norrköping, SE;
Inventors:
Staffan Nordlinder, Norrköping, SE;
Nathaniel D. Robinson, Kolmården, SE;
Payman Therani, Norrköping, SE;
Assignee:
Acreo AB, Kista, SE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for monitoring a substrate patterning process, where at least two electrodes are used to apply a voltage to the substrate to cause a reaction in a portion of the substrate, that includes recording a current driven by said voltage as a function of time and/or as a function of a position of the substrate or a patterning mask. Also disclosed are a device and a computer program product for monitoring the substrate patterning process.