The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Mar. 04, 2010
Rogier Receveur, Maastricht, NL;
Philippe Habets, Maastricht, NL;
Ralph B. Danzl, Tempe, AZ (US);
Richard P. M. Houben, Lanaken, BG;
Michael F. Mattes, Chandler, AZ (US);
Rogier Receveur, Maastricht, NL;
Philippe Habets, Maastricht, NL;
Ralph B. Danzl, Tempe, AZ (US);
Richard P. M. Houben, Lanaken, BG;
Michael F. Mattes, Chandler, AZ (US);
Abstract
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.