The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
May. 16, 2008
Yasuhiro Kawase, Kitakyushu, JP;
Makoto Ikemoto, Kitakyushu, JP;
Atsushi Itou, Kitakyushu, JP;
Makoto Ishikawa, Kitakyushu, JP;
Yasuhiro Kawase, Kitakyushu, JP;
Makoto Ikemoto, Kitakyushu, JP;
Atsushi Itou, Kitakyushu, JP;
Makoto Ishikawa, Kitakyushu, JP;
Mitsubishi Chemical Corporation, Tokyo, JP;
Abstract
To provide a cleaning solution for a substrate for a semiconductor device which is excellent in the ability to remove particles, organic contaminants, metal contaminants and composite contaminants of an organic matter and a metal attached on a substrate surface, whereby the substrate surface can be highly cleaned, without being corroded. Particularly, to provide a cleaning solution which is excellent in the ability to clean low dielectric constant (Low-k) materials on which liquid is easily repelled due to hydrophobic and of which the ability to remove particles is poor. A cleaning solution for a substrate for a semiconductor device, which comprises the following components (A) and (B):
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile