The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Apr. 18, 2008
Marcus Breuer, Dalheim, DE;
Guenther Crolly, Kirchheimbolanden, DE;
Michael Haag, Rodenbach, DE;
Manfred Jung, Limburg, DE;
Thorsten Muehge, Budenheim, DE;
Johannes Paul, Mainz, DE;
Joerg Sauerwein, Mainz, DE;
Rolf Schaefer, Mainz, DE;
Alexandra Welzel, Hahnheim, DE;
Marcus Breuer, Dalheim, DE;
Guenther Crolly, Kirchheimbolanden, DE;
Michael Haag, Rodenbach, DE;
Manfred Jung, Limburg, DE;
Thorsten Muehge, Budenheim, DE;
Johannes Paul, Mainz, DE;
Joerg Sauerwein, Mainz, DE;
Rolf Schaefer, Mainz, DE;
Alexandra Welzel, Hahnheim, DE;
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of manufacturing a magnetic field sensor device in one embodiment includes applying a mask on a substrate, performing a wet etching procedure on the substrate for generating at least a first groove having tilted side walls, and depositing at least one layer of magnetoresistive material onto a section of the surface of at least a first tilted side wall of the groove. A method of manufacturing a magnetic field sensor device on a substrate having a plurality of tilted planar sections, each of the tilted planar sections having a surface normal angled with respect to a surface normal of the substrate is also provided. The method includes depositing a magnetoresistive layered structure positioned at each of the tilted planar sections of the substrate, wherein the tilted planar sections are oriented such that a direction of an applied magnetic field in at least one of an x-, y- and z-direction relative to the substrate is detectable based on field-induced resistance changes of the magnetoresistive layered structures.