The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Feb. 28, 2008
Harry Hedler, Germering, DE;
Roland Irsigler, Munich, DE;
Rolf Weis, Dresden, DE;
Detlef Weber, Ottendorf-Okrilla, DE;
Harry Hedler, Germering, DE;
Roland Irsigler, Munich, DE;
Rolf Weis, Dresden, DE;
Detlef Weber, Ottendorf-Okrilla, DE;
Qimonda AG, München, DE;
Abstract
A feature is inscribed in a major surface of a microelectronic workpiece having a material property expressed as a reference coefficient value. The feature includes a first material having a first coefficient value for the material property and a second material having a second coefficient value for the material property. The first coefficient value is different from the reference coefficient value different from the first coefficient value and the second coefficient value is different from the first coefficient value. The first and second materials behave as an aggregate having an aggregate coefficient value for the material property between the first coefficient value and the reference coefficient value.